- Dec 25, 2013
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Intels 14-nm Parts are Finally Here!
Their analysis is still ongoing, but they've published some information.
The SRAM area is also in agreement with the number reported by Intel.
Their analysis is still ongoing, but they've published some information.
we have measured ten contacted gate pitches as you can see, and that looks pretty close to the 70 nm that was announced by Intel back in August.
On another part of the bevel we can see the fins, and here we have counted 20 pitches (third image above). Which agrees with the 42-nm pitch in the Intel webcast. So far, so good!
A look at the edge seal (fifth image), which doesnt have the top metal or the MIM-cap, makes it easier to count twelve layers. We are used to seeing twelve-plus metal layers in IBM chips (their 22-nm Power8 has fifteen!), but Intel has been using nine for the last few generations, going up to eleven in the Baytrail SoC chip.
Intel quoted 52 nm interconnect pitch, but we see 54 nm (sixth image). Although that is within measurement error, and we may not have sectioned the most tightly packed part of the die.
As yet we dont have any detailed TEM imaging to look at the transistors or fins in close-up, so we cant verify if the fins have vertical walls or not, as shown by Intel (seventh image).
The cross-section seems to show that essentially the 14-nm process is a shrink of the 22-nm technology, with the modified fins; the gate metallisation looks similar to the 22-nm, with tungsten gate fill as in the earlier process. (As an aside, this will make it the fourth generation replacement metal gate process this technology has legs!)
The SRAM area is also in agreement with the number reported by Intel.