Chipworks: Intel’s 14-nm Parts are Finally Here!

witeken

Diamond Member
Dec 25, 2013
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Intel’s 14-nm Parts are Finally Here!

Their analysis is still ongoing, but they've published some information.



we have measured ten contacted gate pitches as you can see, and that looks pretty close to the 70 nm that was announced by Intel back in August.

On another part of the bevel we can see the fins, and here we have counted 20 pitches (third image above). Which agrees with the 42-nm pitch in the Intel webcast. So far, so good!

A look at the edge seal (fifth image), which doesn’t have the top metal or the MIM-cap, makes it easier to count twelve layers. We are used to seeing twelve-plus metal layers in IBM chips (their 22-nm Power8 has fifteen!), but Intel has been using nine for the last few generations, going up to eleven in the Baytrail SoC chip.

Intel quoted 52 nm interconnect pitch, but we see 54 nm (sixth image). Although that is within measurement error, and we may not have sectioned the most tightly packed part of the die.

As yet we don’t have any detailed TEM imaging to look at the transistors or fins in close-up, so we can’t verify if the fins have vertical walls or not, as shown by Intel (seventh image).

The cross-section seems to show that essentially the 14-nm process is a shrink of the 22-nm technology, with the modified fins; the gate metallisation looks similar to the 22-nm, with tungsten gate fill as in the earlier process. (As an aside, this will make it the fourth generation replacement metal gate process – this technology has legs!)

The SRAM area is also in agreement with the number reported by Intel.
 

Justinbaileyman

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Aug 17, 2013
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And where is AMD in all this?? Why are they still stuck on 28nm?? Or doesnt not matter once you get to a certain nm??
 

witeken

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Dec 25, 2013
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And where is AMD in all this?? Why are they still stuck on 28nm?? Or doesnt not matter once you get to a certain nm??

AMD uses Global Foundries or TSMC. TSMC's 28nm successor, 20nm SoC process, is used now used by Apple and some other companies. AMD and Nvidia will move to 20nm somewhere in 2015.
 

Justinbaileyman

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Aug 17, 2013
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Oh very cool thanks.. so then will we see the successor to Kaveri in a 20nm flavor then??I wonder if Intel then will have a competitive IGPU/APU of there own pretty soon??
 

NostaSeronx

Diamond Member
Sep 18, 2011
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The successor to Kaveri is 28nm.
The successor to Carrizo is 14-nm, and so on.
Why are they still stuck on 28nm?
AMD from 2009 to 2011 was waiting for ET-SOI from GlobalFoundries.
Workshop: Fully Depleted SOI architecture, technology platform for Low Power applications for 22nm and beyond - Oct. 16, 2009 - Leuven, Belgium

The development of fully depleted SOI has gained strong momentum in recent years. Although initially FinFETs appeared to be a preferred FDSOI architecture, recent major advances in planar FDSOI devices are strongly positioning this technology towards an interception of the 22/20nm node for Low Power applications. From a design perspective, planar FDSOI is an evolutionary approach that is easier to implement than FinFETs. FDSOI CMOS has proved to reduce the Vt variability by 50-60%, makes possible the smallest SRAM cell operated at Vdd=0.5V with an excellent SNM, reduces Ioff by orders of magnitude and preserves a target performance at a cost per die that is comparable or lower than the equivalent bulk.
This sort of explains why Carrizo is going for low power.

Kaveri - 35W and 95W
to
Carrizo - 15W and 45W

22-nm ET-SOI from IBM in 2009 had an Lg of 25 nanometers. 28-nm UTBB FD-SOI from CEA-Leti in 2011 has an Lg of 24 nanometers. You can take that anyway you want.

Carrizo because AMD was unsure when ET-SOI would be ready. Ported it to the 20-nm node as shown in this linkedin profile: http://in.linkedin.com/in/kvnagesh.

With GlobalFoundries being on time with ET-SOI and it having better performance and yields than 20-nm. It makes sense for Carrizo to be on ET-SOI from GlobalFoundries.
 
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Justinbaileyman

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Aug 17, 2013
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So AMD is going to drag us along with another 28nm release?? I hope they sorted everything out for there next FM2+ release. would be nice to see some improved IPC and speed bump while lowering TDP before they go Carrizo and a new socket.Otherwise this 14nm Intel is sounding kinda good. Maybe an i3 if they can increase the IGPU side of things.Any dates we can expect for either CPU?? I am looking forward to upgrading my 2 Media server HTPC's for 4K play back within the next 3-6 Months.DO you all think we'll see'em by then??
 

NostaSeronx

Diamond Member
Sep 18, 2011
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So AMD is going to drag us along with another 28nm release??
The transistor density of the Steamroller core on 28-nm. Is extremely near equal to the transistor density of Bulldozer and Piledriver cores on 32-nm.

AMD said they will be using high density libraries for post-Steamroller aka Excavator. This gives them a half node increase with a Bulldozer or Piledriver cores on 32-nm with high density libraries. It says nothing about the potential increase with Excavator.

While Carrizo might be on the 28-nm node, it will most likely be more dense than Kaveri.

28-nm HDL + Excavator, we could be seeing in a ~30 mm² space;
450 million transistors, possibly more.

versus
Steamroller - 236 million in ~30 mm²
Bulldozer/Piledrvier - 213 million in ~30 mm²
 
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Roland00Address

Platinum Member
Dec 17, 2008
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So AMD is going to drag us along with another 28nm release?? I hope they sorted everything out for there next FM2+ release. would be nice to see some improved IPC and speed bump while lowering TDP before they go Carrizo and a new socket.Otherwise this 14nm Intel is sounding kinda good. Maybe an i3 if they can increase the IGPU side of things.Any dates we can expect for either CPU?? I am looking forward to upgrading my 2 Media server HTPC's for 4K play back within the next 3-6 Months.DO you all think we'll see'em by then??

We just got 20nm Samsung and TSMC devices like this quarter (Exynos with A57, Apple A8 chips, and before that some qualcomm modems)!

AMD has to use GF for lots of its production (due to history and the wsa). GF is nowhere near on top of things as Samsung or TSMC, maybe in the future with GF licensing process nodes from Samsung but GF is still going be 28nm for its main product for the next 12 months at least.

Furthermore going in the future lots of Samsung and TSMC nodes are going to be focused on low power. While this will help laptop/tablet apus it will not help AMD's desktop line.
 
Mar 10, 2006
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So AMD is going to drag us along with another 28nm release?? I hope they sorted everything out for there next FM2+ release. would be nice to see some improved IPC and speed bump while lowering TDP before they go Carrizo and a new socket.Otherwise this 14nm Intel is sounding kinda good. Maybe an i3 if they can increase the IGPU side of things.Any dates we can expect for either CPU?? I am looking forward to upgrading my 2 Media server HTPC's for 4K play back within the next 3-6 Months.DO you all think we'll see'em by then??

According to Digitimes, AMD will be moving to 20nm for its Nolan/Amur APUs in 3Q 2015.
 

Idontcare

Elite Member
Oct 10, 1999
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Doesnt that look like a defect?

don't they get these images by cutting into a chip? I imagine there is substantial damage and defect caused by that process.

It is true there is damage done to the chip during sample prep, but that particular image has also been further "messed with" as Chipworks sputtered material onto the sample face (ablation deposition) as a means of increasing the contrast between the underlying materials.

What you are looking at is not the materials in the chip, but a layer of platinum (or other heavy metal element) deposited over the top of all those materials so that you can see (different shades of gray) where the different materials are located.

It is a common technique when cross-sectioning SEM samples (it is not done when generating TEM samples), some people still refer to it as "sample staining" because it is done for the exact same reasons.

Staining - uses heavy metals such as lead and uranium to scatter imaging electrons and thus give contrast between different structures, since many (especially biological) materials are nearly "transparent" to the electron beam. By staining the samples with heavy metals, we add electron density to it which results in there being more interactions between the electrons in the primary beam and those of the sample, which in turn provides us with contrast in the resultant image. In biology, specimens can be stained "en bloc" before embedding and/or later, directly after sectioning, by brief exposure of the sections to solutions of the heavy metal stains.
What is Electron Microscopy?

I bring this all up to say you need to be careful when looking at SEM cross-section images as not all images are created equal. The ones shown by Chipworks appear to be way over-etched and over-stained, perhaps because they were rushing to get initial samples out or perhaps because they just didn't take time in preparation to perform as good of a job as they could have.

So what appears to be a manufacturing defect to the eye is very likely to be a sample prep defect in reality.

For example, you can clearly see the copper is missing from a metal line in the middle of the SEM image in another one of Chipworks' samples, but there is no way Intel is shipping chips with that kind of a missing copper defect (it is a complete reliability killer):



The copper had to have been there prior to sample prep, not a good sample for imaging IMO, or they are holding back the good ones for paying customers only.
 

Roland00Address

Platinum Member
Dec 17, 2008
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or they are holding back the good ones for paying customers only.
I wish I had enough money I can blow on pretty pictures of sexy technology. Then again those pictures for my use would be useless except art. If I had the money to buy such stuff I can probably find a better use for it than this even though it is cool

(yes I know these pictures have industrial/investional uses, but I am not the captain of industry that can translate this knowledge into profit.)
 

AtenRa

Lifer
Feb 2, 2009
14,003
3,361
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Im not an expert but to me it looks like a defect in the crystalline groing process.
It is bellow the M1 metal stack so it shouldnt be affecting the operation of the interconnect.

 

SAAA

Senior member
May 14, 2014
541
126
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So the numbers claimed seem spot on, now if only they could do the same to the competitors 20nm parts that would be interesting.

About those defects, even if some where there before the cuts isn't the design redundant enough for single errors? I hope in a billion transistors part a few bad fins for example can't kill the whole chip...
 
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