Not only TSMC, Globalfoundries and others have noticed that Intel nanometer is not everyone else nanometer. Globalfoundries claims
A comment from one of the articles you posted here. You, as usual, didn't bother checking, but I'll repost here for the sake of the information. It is quite informative and might be an interesting reading for the honest posters here:
Ill repeat some useful numbers Ive given before at our events. As can be seen for SRAM the Intel 22nm is almost but not quite twice as dense as their 32nm process, whilst TSMC and GF processes fit in roughly to the Intel densities as given by the names of their nodes.
Once upon a time half the metal M1 pitch defined the node but in recent years metal pitch reduction has not kept pace with other features so fabs have tended to reference the node as the ratio to the density of SRAM at 65 or 90nm.
Certainly there is a LOT of market BS taking place as well (Intel included) but in reality Intel does lead the way in density at least.
Of course SRAM density isnt everything but with BEOL limited by the desire to stay with single patterning, for logic the metal routing now begins to dominate over transistor size.
The drawn gate length is not really a relevant measure any more and in any case has never been the official definition of the node. It is generally used to set the performance of the transistor, shorter is faster whilst longer is slower but less leakage. The move to FinFETs allowed the performance and density of the next node to be achieved without going to shorter gate lengths which would have excessive leakage.
The additional complication of FD-SOI as a competing process technology will prove interesting. Despite the hype, FD-SOI SRAM densities wont match the densest FinFET SRAMs at the same node, but leakage will be noticeably better, causing a definite process branch applicable to numerous applications.
The stats are :
SRAMs
(HP and special low power versions are larger for all fabs)
Intel 45nm SRAM cell 0.346um^2
Intel 32nm SRAM cell 0.171um^2
Intel 22nm SRAM cell 0.092um^2
TSMC 40nm SRAM cell 0.290um^2
TSMC 28nm SRAM cell 0.127um^2
TSMC 20nm SRAM cell 0.090um^2
GF 28nm SRAM cell 0.120um^2
ST 28nm FD-SOI SRAM cell 0.120um^2 (this is believed to be the version with no back-gate and uncompetitive leakage 0.152um^2 for back-gate and lowest power/leakage but of course LP versions of other processes are also larger)
Metal pitch
(once upon a time half this was the node size but as can be seen the transistors have shrunk a lot more than the metal)
Intel 22nm metal pitch 64nm
Intel 14nm metal pitch 48nm
TSMC 28nm metal pitch 64nm
TSMC 20nm metal pitch 64nm
GF 14nm metal pitch 48nm (predicted)
Contacted gate pitch
(this is a key dimension in that it is no point making transistor gates shorter unless you can reduce this number to match)
Intel 32nm contacted gate pitch 112nm
Intel 22nm contacted gate pitch 90nm (80nm with special processing)
Intel 14nm contacted gate pitch unknown
TSMC 40nm contacted gate pitch 160nm
TSMC 28nm contacted gate pitch 118nm
TSMC 20nm contacted gate pitch unknown
TSMC 14nm contacted gate pitch unknown
GF 28nm contacted gate pitch 113nm
GF 20nm contacted gate pitch 80nm
GF 14nm contacted gate pitch not relevant as BEOL is stated as being the same as 20nm. However this may change in due course.
I hope this helps
Mike Bryant